Ausschreibung: Rasterelektronenmikroskope - DK-Kgs. Lyngby Rasterelektronenmikroskope Dokument Nr...: 222468-2021 (ID: 2021050409122027546) Veröffentlicht: 04.05.2021 * DK-Kgs. Lyngby: Rasterelektronenmikroskope 2021/S 86/2021 222468 Freiwillige Ex-ante-Transparenzbekanntmachung Lieferauftrag Rechtsgrundlage: Richtlinie 2014/24/EU Abschnitt I: Öffentlicher Auftraggeber/Auftraggeber I.1)Name und Adressen Offizielle Bezeichnung: Danmarks Tekniske Universitet DTU Nationale Identifikationsnummer: 30060946 Postanschrift: Anker Engelunds Vej 1 Ort: Kgs. Lyngby NUTS-Code: DK01 Hovedstaden Postleitzahl: 2800 Land: Dänemark Kontaktstelle(n): Christian Torrendrup E-Mail: [6]cvto@dtu.dk Telefon: +45 23100296 Internet-Adresse(n): Hauptadresse: [7]http://www.dtu.dk I.4)Art des öffentlichen Auftraggebers Einrichtung des öffentlichen Rechts I.5)Haupttätigkeit(en) Bildung Abschnitt II: Gegenstand II.1)Umfang der Beschaffung II.1.1)Bezeichnung des Auftrags: Gemini SEM 500 Referenznummer der Bekanntmachung: 6205 II.1.2)CPV-Code Hauptteil 38511100 Rasterelektronenmikroskope II.1.3)Art des Auftrags Lieferauftrag II.1.4)Kurze Beschreibung: At DTU Nanolabs cleanroom, we have a need to upgrade our SEM capability with a high-end instrument. The instrument will be a central tool for our nanostructure qualification which is described in the detailed explanation/justification below. II.1.6)Angaben zu den Losen Aufteilung des Auftrags in Lose: nein II.1.7)Gesamtwert der Beschaffung (ohne MwSt.) Wert ohne MwSt.: 2 650 000.00 DKK II.2)Beschreibung II.2.2)Weitere(r) CPV-Code(s) 38511100 Rasterelektronenmikroskope II.2.3)Erfüllungsort NUTS-Code: DK01 Hovedstaden Hauptort der Ausführung: Kgs. Lyngby (DTU Campus). II.2.4)Beschreibung der Beschaffung: At DTU Nanolab, we have a current need to upgrade our SEM capability with a high-end instrument. A Schottky field emission (thermionic) source offering high emission at low energy spread will be necessary for providing a state of the art resolution of 0.5 nm or better at 15 kV (no immersion applied) and 1.0 nm or better at 0.5 kV (no beam deceleration or sample bias applied) using an in-lens detector. The instrument will need a beam-booster as it guarantees optimum beam conditions particularly at low acceleration voltages a critically important mode of operation for a vast number of applications in our lab. Likewise, to ensure a high sample throughput and ideal imaging conditions free of hydrocarbon contamination, the chamber must be equipped with a fully integrated airlock system and a chamber-mounted plasma cleaner. It is our intention that the SEM cover the most challenging applications in our lab. Consequently, it should be highly versatile and host a broad selection of advanced electron detectors in addition to the standard Everhart-Thornley secondary electron (SE) detector for high vacuum conditions. Firstly, to qualify subtle material contrast differences in III-V materials, we need in-column energy selective detection of backscatter electrons (BSE's). Working in parallel, a separate annular in-lens detector will detect the in-column secondary electrons. Secondly, to provide an alternative path for differentiating the same minuscule material variations, the chamber-mounted and pneumatically retractable BSE detector should have segmented annular diode detectors each of which should have individual amplification to allow angular selection of BSE's. Thirdly, we are facing an increasing number of applications relying on the precise manufacturing of ultra-thin membranes. In this regard, we could dramatically improve our characterisation capability with an annular STEM detector for high-resolution transmission measurements. Finally, we have a strong need to upgrade our ability to characterize nano-structures defined by electron beam lithography. The world-class performance of our Jeol JBX-9500FSZ E-Beam writer is simply not matched by our current SEM characterisation capability. The situation is especially challenging for line edge roughness measurements of sub 20 nanometre E-beam resist structures de-posited onto non-conducting substrates. Here, the need for charge compensation with its detrimental effects on the electron beam quality conflicts with the demand for extremely high image resolution. Clearly, we do not want to apply any kind of sample coating in order to reduce sample charging and thus suppress the high pressure requirement. The acquisition concerns a fully refurbished Carl Zeiss GeminiSEM 500 consisting of: Basic Unit GeminiSEM 500 with airlock; 20nA High resolution configuration for CC/VP systems; NanoVP variable pressure imaging option; Plasma Cleaner with integrated software control in SmartSEM; 5-axes stepper stage with Tandem decel sample bias; Navigation with KLA and Lasertec files for defect detection. The system is fitted with the following electron detectors: Everhart-Thornley SE detector; Annular Inlens SE detector; Inlens energy selective backscatter (EsB) detector; Pneumatically retractable 4 quadrant solid state BSE detector; Dedicated BSE detector for NanoVP; Annular STEM detector. II.2.5)Zuschlagskriterien II.2.11)Angaben zu Optionen Optionen: nein II.2.13)Angaben zu Mitteln der Europäischen Union Der Auftrag steht in Verbindung mit einem Vorhaben und/oder Programm, das aus Mitteln der EU finanziert wird: nein II.2.14)Zusätzliche Angaben Abschnitt IV: Verfahren IV.1)Beschreibung IV.1.1)Verfahrensart Verhandlungsverfahren ohne vorherige Bekanntmachung * Die Bauleistungen/Lieferungen/Dienstleistungen können aus folgenden Gründen nur von einem bestimmten Wirtschaftsteilnehmer ausgeführt werden: + nicht vorhandener Wettbewerb aus technischen Gründen Erläuterung: The NanoVP option of the Carl Zeiss GeminiSEM 500 is uniquely suited in this respect. This option provides a solution combining the high resolution of the in-column detection capabilities of both SEs and BSEs with high pressure conditions at the sample. To our knowledge, this option is a unique solution to this particular problem: The SEM must provide inlens detection of SEs to ensure the required image resolution on insulating samples that demand pressures up 150 Pa in order to suppress charging effects. Another very important feature is the possibility for navigation with KLA and Lasertec files which provides means for efficient defect review in combination with our KLA Tencor profilometer in the cleanroom. A Carl Zeiss GeminiSEM 500 instrument with the above-mentioned configuration and functionalities uniquely meets all the present demands listed above and therefore, Carl Zeiss is the only supplier able to fulfil DTUs needs as listed. Such instrument can be delivered already within one month and within our budget (DKK 2 650 000 000). IV.1.3)Angaben zur Rahmenvereinbarung IV.1.8)Angaben zum Beschaffungsübereinkommen (GPA) Der Auftrag fällt unter das Beschaffungsübereinkommen: ja IV.2)Verwaltungsangaben Abschnitt V: Auftragsvergabe/Konzessionsvergabe V.2)Auftragsvergabe/Konzessionsvergabe V.2.1)Tag der Zuschlagsentscheidung: 28/04/2021 V.2.2)Angaben zu den Angeboten Der Auftrag wurde an einen Zusammenschluss aus Wirtschaftsteilnehmern vergeben: nein V.2.3)Name und Anschrift des Auftragnehmers/Konzessionärs Offizielle Bezeichnung: Carl Zeiss A/S Postanschrift: Bregnerødvej 133 Ort: Birkerød NUTS-Code: DK01 Hovedstaden Postleitzahl: 3460 Land: Dänemark Der Auftragnehmer/Konzessionär wird ein KMU sein: nein V.2.4)Angaben zum Wert des Auftrags/Loses/der Konzession (ohne MwSt.) Gesamtwert des Auftrags/des Loses/der Konzession: 2 650 000.00 DKK V.2.5)Angaben zur Vergabe von Unteraufträgen Abschnitt VI: Weitere Angaben VI.3)Zusätzliche Angaben: VI.4)Rechtsbehelfsverfahren/Nachprüfungsverfahren VI.4.1)Zuständige Stelle für Rechtsbehelfs-/Nachprüfungsverfahren Offizielle Bezeichnung: Klagenævnet for Udbud Postanschrift: Nævnenes hus, Toldboden 2 Ort: Viborg Postleitzahl: 8800 Land: Dänemark E-Mail: [8]klfu@erst.dk Telefon: +45 35291000 Internet-Adresse: [9]http://www.klfu.dk VI.4.3)Einlegung von Rechtsbehelfen Genaue Angaben zu den Fristen für die Einlegung von Rechtsbehelfen: Complaint that the contracting authority, contrary to the Public Procurement Act, has concluded a contract without prior publication of a contract notice in the European Union Official Journal must be submitted no later than 30 calendar days from the date after a contract award notice has been published by the Contracting Authority in the European Union Official Journal and that contract award notice includes the grounds for the decision to award the contract directly, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, section 3. VI.4.4)Stelle, die Auskünfte über die Einlegung von Rechtsbehelfen erteilt Offizielle Bezeichnung: Konkurrence- og Forbrugerstyrelsen Postanschrift: Carl Jacobsens Vej 35 Ort: Valby Postleitzahl: 2500 Land: Dänemark E-Mail: [10]kfst@kfst.dk Telefon: +45 41715000 Internet-Adresse: [11]http://www.kfst.dk VI.5)Tag der Absendung dieser Bekanntmachung: 29/04/2021 References 6. mailto:cvto@dtu.dk?subject=TED 7. http://www.dtu.dk/ 8. mailto:klfu@erst.dk?subject=TED 9. http://www.klfu.dk/ 10. mailto:kfst@kfst.dk?subject=TED 11. http://www.kfst.dk/ OT: 04/05/2021 S86 Denmark-Kgs. Lyngby: Scanning electron microscopes 2021/S 086-222468 Voluntary ex ante transparency notice Supplies Legal Basis: Directive 2014/24/EU Section I: Contracting authority/entity I.1)Name and addresses Official name: Danmarks Tekniske Universitet DTU National registration number: 30060946 Postal address: Anker Engelunds Vej 1 Town: Kgs. Lyngby NUTS code: DK01 Hovedstaden Postal code: 2800 Country: Denmark Contact person: Christian Torrendrup E-mail: [6]cvto@dtu.dk Telephone: +45 23100296 Internet address(es): Main address: [7]http://www.dtu.dk I.4)Type of the contracting authority Body governed by public law I.5)Main activity Education Section II: Object II.1)Scope of the procurement II.1.1)Title: Gemini SEM 500 Reference number: 6205 II.1.2)Main CPV code 38511100 Scanning electron microscopes II.1.3)Type of contract Supplies II.1.4)Short description: At DTU Nanolabs cleanroom, we have a need to upgrade our SEM capability with a high-end instrument. The instrument will be a central tool for our nanostructure qualification which is described in the detailed explanation/justification below. II.1.6)Information about lots This contract is divided into lots: no II.1.7)Total value of the procurement (excluding VAT) Value excluding VAT: 2 650 000.00 DKK II.2)Description II.2.2)Additional CPV code(s) 38511100 Scanning electron microscopes II.2.3)Place of performance NUTS code: DK01 Hovedstaden Main site or place of performance: Kgs. Lyngby (DTU Campus). II.2.4)Description of the procurement: At DTU Nanolab, we have a current need to upgrade our SEM capability with a high-end instrument. A Schottky field emission (thermionic) source offering high emission at low energy spread will be necessary for providing a state of the art resolution of 0.5 nm or better at 15 kV (no immersion applied) and 1.0 nm or better at 0.5 kV (no beam deceleration or sample bias applied) using an in-lens detector. The instrument will need a beam-booster as it guarantees optimum beam conditions particularly at low acceleration voltages a critically important mode of operation for a vast number of applications in our lab. Likewise, to ensure a high sample throughput and ideal imaging conditions free of hydrocarbon contamination, the chamber must be equipped with a fully integrated airlock system and a chamber-mounted plasma cleaner. It is our intention that the SEM cover the most challenging applications in our lab. Consequently, it should be highly versatile and host a broad selection of advanced electron detectors in addition to the standard Everhart-Thornley secondary electron (SE) detector for high vacuum conditions. Firstly, to qualify subtle material contrast differences in III-V materials, we need in-column energy selective detection of backscatter electrons (BSE's). Working in parallel, a separate annular in-lens detector will detect the in-column secondary electrons. Secondly, to provide an alternative path for differentiating the same minuscule material variations, the chamber-mounted and pneumatically retractable BSE detector should have segmented annular diode detectors each of which should have individual amplification to allow angular selection of BSE's. Thirdly, we are facing an increasing number of applications relying on the precise manufacturing of ultra-thin membranes. In this regard, we could dramatically improve our characterisation capability with an annular STEM detector for high-resolution transmission measurements. Finally, we have a strong need to upgrade our ability to characterize nano-structures defined by electron beam lithography. The world-class performance of our Jeol JBX-9500FSZ E-Beam writer is simply not matched by our current SEM characterisation capability. The situation is especially challenging for line edge roughness measurements of sub 20 nanometre E-beam resist structures de-posited onto non-conducting substrates. Here, the need for charge compensation with its detrimental effects on the electron beam quality conflicts with the demand for extremely high image resolution. Clearly, we do not want to apply any kind of sample coating in order to reduce sample charging and thus suppress the high pressure requirement. The acquisition concerns a fully refurbished Carl Zeiss GeminiSEM 500 consisting of: Basic Unit GeminiSEM 500 with airlock; 20nA High resolution configuration for CC/VP systems; NanoVP variable pressure imaging option; Plasma Cleaner with integrated software control in SmartSEM; 5-axes stepper stage with Tandem decel sample bias; Navigation with KLA and Lasertec files for defect detection. The system is fitted with the following electron detectors: Everhart-Thornley SE detector; Annular Inlens SE detector; Inlens energy selective backscatter (EsB) detector; Pneumatically retractable 4 quadrant solid state BSE detector; Dedicated BSE detector for NanoVP; Annular STEM detector. II.2.5)Award criteria II.2.11)Information about options Options: no II.2.13)Information about European Union funds The procurement is related to a project and/or programme financed by European Union funds: no II.2.14)Additional information Section IV: Procedure IV.1)Description IV.1.1)Type of procedure Negotiated procedure without prior publication * The works, supplies or services can be provided only by a particular economic operator for the following reason: + absence of competition for technical reasons Explanation: The NanoVP option of the Carl Zeiss GeminiSEM 500 is uniquely suited in this respect. This option provides a solution combining the high resolution of the in-column detection capabilities of both SEs and BSEs with high pressure conditions at the sample. To our knowledge, this option is a unique solution to this particular problem: The SEM must provide inlens detection of SEs to ensure the required image resolution on insulating samples that demand pressures up 150 Pa in order to suppress charging effects. Another very important feature is the possibility for navigation with KLA and Lasertec files which provides means for efficient defect review in combination with our KLA Tencor profilometer in the cleanroom. A Carl Zeiss GeminiSEM 500 instrument with the above-mentioned configuration and functionalities uniquely meets all the present demands listed above and therefore, Carl Zeiss is the only supplier able to fulfil DTUs needs as listed. Such instrument can be delivered already within one month and within our budget (DKK 2 650 000 000). IV.1.3)Information about framework agreement IV.1.8)Information about the Government Procurement Agreement (GPA) The procurement is covered by the Government Procurement Agreement: yes IV.2)Administrative information Section V: Award of contract/concession V.2)Award of contract/concession V.2.1)Date of contract award decision: 28/04/2021 V.2.2)Information about tenders The contract has been awarded to a group of economic operators: no V.2.3)Name and address of the contractor/concessionaire Official name: Carl Zeiss A/S Postal address: Bregnerødvej 133 Town: Birkerød NUTS code: DK01 Hovedstaden Postal code: 3460 Country: Denmark The contractor/concessionaire will be an SME: no V.2.4)Information on value of the contract/lot/concession (excluding VAT) Total value of the contract/lot/concession: 2 650 000.00 DKK V.2.5)Information about subcontracting Section VI: Complementary information VI.3)Additional information: VI.4)Procedures for review VI.4.1)Review body Official name: Klagenævnet for Udbud Postal address: Nævnenes hus, Toldboden 2 Town: Viborg Postal code: 8800 Country: Denmark E-mail: [8]klfu@erst.dk Telephone: +45 35291000 Internet address: [9]http://www.klfu.dk VI.4.3)Review procedure Precise information on deadline(s) for review procedures: Complaint that the contracting authority, contrary to the Public Procurement Act, has concluded a contract without prior publication of a contract notice in the European Union Official Journal must be submitted no later than 30 calendar days from the date after a contract award notice has been published by the Contracting Authority in the European Union Official Journal and that contract award notice includes the grounds for the decision to award the contract directly, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, section 3. VI.4.4)Service from which information about the review procedure may be obtained Official name: Konkurrence- og Forbrugerstyrelsen Postal address: Carl Jacobsens Vej 35 Town: Valby Postal code: 2500 Country: Denmark E-mail: [10]kfst@kfst.dk Telephone: +45 41715000 Internet address: [11]http://www.kfst.dk VI.5)Date of dispatch of this notice: 29/04/2021 -------------------------------------------------------------------------------- Database Operation & Alert Service (icc-hofmann) for: The Office for Official Publications of the European Communities The Federal Office of Foreign Trade Information Phone: +49 6082-910101, Fax: +49 6082-910200, URL: http://www.icc-hofmann.de